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Products | Techno-Lead Japan Co., Ltd.
PRODUCTS
Photo-mask equipment
CD Measurement system/ MueTec(Germany)
- Global standard tool in all Mask Shop for long time.
- Optical CD measuring (Transmittance ＆Reflection light)
- Long life time by LED light source.
- Min CD = 0.36µm by using X150UV lens, 1nm repeatability
Photo-Mask Repair/COWIN(Korea)
- apply for up to G10 FPD mask & LSI mask( 5, 6, 7" size)
- ZAP, CVD, HT-CVD function. Apply for KrF/ArF masks
- ZAP for less than 0.5um and strong adhesion by CVD
- attach with AGV/MGV. Attach for RSP＋robot handling
Mask Writer /Artfil(Japan)
- High-speed & High performance writer with DMD & LED
- Min. feature: 0.5um with High throughput
- standard function of CD Calibration /OPC /Alignment
- IPs for Writing strategy and hold new technology
XY coordinate Registration/Artfil(Japan)
- Registration measurement tool for FPD & LSI mask
- apply High accuracy Linear scale, so stable in Environment
- High performance repeatability & high speed tact time
- attach with AGV/MGV. Attach for RSP＋robot handling
Wet Process systems
Coater system
- custom made Photo-resist coater system
- Spin coating or Slit coating type
- apply for FPD & LSI Mask blanks, and FPD plate and Wafer
- Coating uniformity: less than 1% with stable running
Wet process line(baking・Developing・Etching・Stripping , etc.)
- any process can be supplied like EBR/Bake/Vacuum dry
- optimized configuration according to customer requests
- apply for FPD & LSI mask, and FPD plate and Si wafer
- Many sales record and reasonable cost
Photo-mask, FPD plate Cleaning system
- optimized for Mask plates and Bare glass of FPD
- apply for FPD mask & FPD mask up to G10
- function of Brush/Ultrasonic/Chemical cleaning
- customized for any glass or lens or such material
Semiconductor Production related systems
AMC Monitor system/Tricorntech(Taiwan)
- detect Organic/Inorganic gas and VOC/Amine /Asid, etc.
- Real time monitoring and apply for in-line 24 hours
- Multi-points monitoring by one tool and mobile tool
- 0.1ppb level monitoring with Non-radioactive technology
AMC monitor in FOUP/Tricortech(Taiwan)
- analyze AMC inside of FOUP and contaminated wafer
- N2 purge function for cleaning inside of FOUP
- Two Load ports and network function like SECS to manage
- supply technical support with reasonable cost in Japan
Macro Inspection system for Wafer/MueTec(Germany)
- Macron inspection tool for 200㎜/300㎜ wafer as production
- measuring both top & bottom surface of wafer at same time
- apply for Bright & Dark field with up to 2um resolution
- High speed throughput and apply Cassette or FOUP
CD&Overlay measuement・IR inspection system/MueTec(Germany)
- CD & Overlay measurement for MEMS, PD, WLP inside
- High accuracy & High speed measurement for ６, 8, 12"wafer
- Multi function system with IR inspection in one machine
- many sales record and reasonable cost & stable running
FMM(Fine Metal Mask)Laser Repair system/COWIN(Korea)
- Laser drilling & Inspection & Dry cleaning for O-LED FMM
- High speed process by High power laser with Galvano Scan
- Repair tool for Emulsion mask and Inkjet repair tool
- many sales record and Mass production system
3D Laser Printer system/Riton(China)
- 3D Molding Printer for Metal/Plastic/Denture material
- 3D printer of many business record for Oral medical market
- 200㎜□ molding size with accuracy of less than 50um
- High speed process, Low cost performance, quick lead time
3D Measuring machine/TZTEK(China)
- 3D measuring machine with several work size models
- Max. work size:1600X1200 X250mm, order made for big size
- apply Linear scale/THK motion guide with 0.1um resolution
- stable running , low cost performance, short delivery time
Electronic material (Sapphire・quartz ・other materials)
- Sapphire wafer/μPSS pattern wafer
- Wafer size : ２”, 4”, 6”, 8”
- Quartz material for special size, recycle quartz available
- Smal quantity, special material available with low cost
Security IP for Industrial machine & Robot system
- apply for Inductrial machine, robots, Uthility device, etc
- protect machine & device from Out/In side Ciber attack
- secure version update and avoid operation mistake
- needed IP to apply for International Secrity starndard
Laser product system・others