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BUSINESS

BUSINESS

Business activities

Our business model has two portions in Industrial equipment & electronic device. One is Development & manufacturing for the process related products. Another is Trading business of leading edge products between Japan and foreign countries. We provide not only sales but also technical service to our customers and our main products are related to Laser Lithography and Litho-process technology and applied into Photo-mask market, FPD process & Semiconductor related market with Inspection & Repair technology. Our business area is mainly Japan market and also targeting to other East Asian area (Taiwan, Korea, China) by using our strong network & quick action.

Cooperators

Makers & Dealers

Reinforcement items introduction

AMC Monitor system

AMC Monitor system

AMC(Airborne Molecular Contamination)Monitor system is used for real monitoring such chemical gases which may be generated in Litho-process and bad affect to Exposure machines for high-end Semiconductor production. The system can be measured with 0.1ppb level and managed at multi-points by one system. Our AMC monitor systems have many sales record in Semiconductor makers of Japan and Foreign. It should be more and more important item in Semiconductor manufacturing factories in a future.

Overlay & CD Measurement system in Si wafer

Overlay & CD Measurement system in Si wafer

This machine has High-throughput system for Overlay & CD measurement in 200mm/300mm Wafer inspection. FOUP cassette is applied as the standard and many sales record in Semiconductor makers. Those are quite stably running and easy to do maintenance with very reasonable cost performance.

Spin coater system

Spin coater system

Our own wet process systems are designed and manufactured by custom made mostly so that it should be quite optimized to each customers. In such process systems, our spin coater technology has a state of the art performance and specially applied to coat Photo-Resist(PR) on Mask blanks. The uniformity of PR coating is easily reached to less than 1 % constantly and working very stably without trouble.